M. Hargrove, S.W. Crowder, et al.
IEDM 1998
A general methodology for direct thermal patterning of self-assembled nanoparticle films is presented. Specifically, using laser heating we have fabricated ferromagnetic FePt nanoparticle array patterns with 0.8 μm pitch and an edge resolution of ∼100 nm. The nanoparticle arrays have been investigated by scanning SQUID microscopy and MFM. Finally, we have measured the patterning rate as a function of temperature by monitoring the change in optical reflectance.
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Lawrence Suchow, Norman R. Stemple
JES
Douglass S. Kalika, David W. Giles, et al.
Journal of Rheology