William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
It is shown that the technologies required to produce large normal-incidence multilayer x-ray mirrors with diffraction-limited resolution are now available. Applications of these mirrors in x-ray astronomy and x-ray lithography are discussed. © 1994 by Academic Press, Inc.
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
J. Tersoff
Applied Surface Science
Frank Stem
C R C Critical Reviews in Solid State Sciences