Ruixiong Tian, Zhe Xiang, et al.
Qinghua Daxue Xuebao/Journal of Tsinghua University
No abstract available.
Ruixiong Tian, Zhe Xiang, et al.
Qinghua Daxue Xuebao/Journal of Tsinghua University
Robert Manson Sawko, Malgorzata Zimon
SIAM/ASA JUQ
Ligang Lu, Jack L. Kouloheris
IS&T/SPIE Electronic Imaging 2002
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009