Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Some aspects of splitting and delamination of composite materials from surface flaws are discussed. The system modelled is one of an elastically homogeneous material containing aligned interfaces. This simplified model, although missing some of the details that would be associated with elastic inhomogeneity, does permit a discussion of some of the factors that govern this type of delamination. © 1989, Chapman and Hall Ltd.. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
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Macromolecules
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008