Peter J. Price
Surface Science
This paper will describe the strengths and unique challenges of building 193nm resists from acrylic polymers and cyclic olefin polymers. In particular, cyclic olefm (alternating) copolymer synthesis and properties will be discussed. ©1999TAPJ.
Peter J. Price
Surface Science
R.D. Murphy, R.O. Watts
Journal of Low Temperature Physics
Robert W. Keyes
Physical Review B
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials