A. Gangulee, F.M. D'Heurle
Thin Solid Films
This paper will describe the strengths and unique challenges of building 193nm resists from acrylic polymers and cyclic olefin polymers. In particular, cyclic olefm (alternating) copolymer synthesis and properties will be discussed. ©1999TAPJ.
A. Gangulee, F.M. D'Heurle
Thin Solid Films
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MRS Spring Meeting 1993
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Surface Science