Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The growth of single crystal pyroelectric Li2GeO3 by the Czochralski technique is described and measurements of several of its piezoelectric and acoustic properties reported. The electromechanical coupling factor k2t in c-cut Li2GeO3 is approximately five times that of α-quartz. © 1970.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Advanced Materials
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