Cross-sectioning of layered thin films by ultramicrotomy

A.F. Marshall; D.C. Dobbertin

doi:10.1016/0304-3991(86)90008-2

Ultramicroscopy

Paper

01 Jan 1986

Cross-sectioning of layered thin films by ultramicrotomy

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Abstract

Ultramicrotomy is shown to be a valuable technique for observing thin films in cross-section. The structure of layered Co-Tb and Mo-Ge films are characterized, with layers as thin as 0.9 nm resolved in the latter. © 1986.

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