M.A. Lutz, R.M. Feenstra, et al.
Surface Science
Paper
Coverage effects on the BCF surface diffusion model
Abstract
The catchment area depends on both supersaturation and equilibrium coverage; it is always less than the BCF estimate. © 1974.
Related
David B. Mitzi
Journal of Materials Chemistry
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007