H.R. Brown
International Conference on the Role of Interfaces in Advanced Materials Design, Processing and Performance 1993
A flexible imprinter can be used to accommodate substrate or template roughness in nanoimprint lithography. The contact mechanics of a multi-layer imprinter incorporating bending and local deformation is described. With the right combination of dimensions, moduli, and viscosity, the imprinter can transfer a pattern evenly to a non-flat substrate. These concepts have been used to pattern magnetic media for high density information storage. © 2005 Springer Science+Business Media. Inc.
H.R. Brown
International Conference on the Role of Interfaces in Advanced Materials Design, Processing and Performance 1993
A. Krol, C.J. Sher, et al.
Surface Science
T.C. Huang, V.Y. Lee, et al.
Materials Research Bulletin
Amol Thakkar, Andrea Antonia Byekwaso, et al.
ACS Fall 2022