Characterization of semiconductor silicon by transmission electron microscopy

In this review some basics of the transmission electron microscopy, the instrument, its operations and the types of scientific information obtainable from crystalline materials are first discussed and then some subjects pertaining to recent characterization of silicon are discussed. The subjects chosen are those that had outstanding impacts in technology and/or in science for which studies using the transmission electron microscope forms an indispen- sible part of the characterization efforts. © 1984 SPIE.