Conference paper
Isotropic treatment of EMF effects in advanced photomasks
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
Richard M. Karp, Raymond E. Miller
Journal of Computer and System Sciences
A.R. Gourlay, G. Kaye, et al.
Proceedings of SPIE 1989
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003