Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We present data on elastic neutron scattering in KTaO3: Li and investigate the structural changes associated with the transition to a dipole-glass phase at TG. It is shown that the host lattice is cubic both below and above TG and that the striking increases of the scattering intensities at TG originate from relief of extinction. © 1989.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
Ronald Troutman
Synthetic Metals
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films