Conference paper
Preparation of SrRuO3 films for advanced CMOS metal gates
K. Fröhlich, K. Hušeková, et al.
Materials Science in Semiconductor Processing
A new beetle-like scanning tunneling microscope is presented that operates under ultrahigh vacuum conditions and at temperatures down to 7 K. Magnetic fields up to 8 Tesla can be applied using a movable superconducting magnet. The entire setup is described in detail and test measurements are presented.
K. Fröhlich, K. Hušeková, et al.
Materials Science in Semiconductor Processing
C. Rossel, P. Bauer, et al.
Journal of Applied Physics
C. Rossel, A. Catana, et al.
Physica C: Superconductivity and its applications
K. Niskanen, P. Norling, et al.
Physica C: Superconductivity and its applications