Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Paper

01 Jan 1988

Auger analyzer translation using ball bushings

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Abstract

We describe a ball bushing assembly which supports a cylindrical mirror analyzer allowing it to be translated 5.5 in. By a linear motion feedthrough. The assembly mounts on an 8-in. Flange and avoids the use of bellows. © 1988, American Vacuum Society. All rights reserved.

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