Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We describe a ball bushing assembly which supports a cylindrical mirror analyzer allowing it to be translated 5.5 in. By a linear motion feedthrough. The assembly mounts on an 8-in. Flange and avoids the use of bellows. © 1988, American Vacuum Society. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Micro and Nano Engineering
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