Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Epitaxial films of Mn can be grown on Pd{111} to thicknesses of the order of 15"20 layers. Vacuum deposition on a room-temperature substrate produces a threefold-symmetric 1×1 phase with in-plane lattice constant a=2.75 (pseudomorphic to Pd{111}) and bulk interlayer spacing dbulk=2.16. This structure probably corresponds to strained magnetic -Mn. Vacuum deposition on a 150°C substrate produces a sixfold-symmetric 3 × 3 -30°structure, which is probably a bulk phase with in-plane lattice constant a=4.76. The atomic structure of this phase is unknown, but may be related to ±-Mn. © 1992 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
J.H. Kaufman, Owen R. Melroy, et al.
Synthetic Metals