Annealing of residual stress in silicon monoxide films [1]

Paper

20 Nov 2002

Abstract

No abstract available.

Paper

H.L. Caswell, Y. Budo

Solid-State Electronics

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Journal of Applied Physics

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H.L. Caswell, J.R. Priest, et al.

Journal of Applied Physics

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R.J. Von Gutfeld, H.L. Caswell

Applied Physics Letters