Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A simple method is shown for computing the Airy stress function for two-dimensional problems. The method is applied to a simple mechanics example and to large computer-generated atomic models whose properties are independent of some coordinate z. The method has recently proved useful for analyzing topological defects in computer-generated models of amorphous solids. © 1981.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Peter Wendt
Electronic Imaging: Advanced Devices and Systems 1990
Ehud Altman, Kenneth R. Brown, et al.
PRX Quantum
J. LaRue, C. Ting
Proceedings of SPIE 1989