Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Measurements of the complex A.C. susceptibility and magnetization of crystals of polysulphur nitride, (SN)x, are reported. At temperatures near 0.2K both the in-phase and quadrature components of the A.C. susceptibility show a marked change which can be related to the onset of superconductivity. However, changes in the sample magnetization could not be detected. © 1977.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
P. Alnot, D.J. Auerbach, et al.
Surface Science
David B. Mitzi
Journal of Materials Chemistry
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering