Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
An equivalent circuit for a porous polycrystalline insertion electrode is presented. This model is found to be inadequate to describe the ac response of the Li(1-x)CoO2/LiBF4 in propylene carbonate interface because of the formation of a Li+-ion conducting layer on the surface of the electrode. Lithium diffusion in the electrode is determined by three methods which all indicate a value grater than that reported for TiS2. © 1986.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Macromolecules
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ACS Macro Letters
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INFORMS 2021