Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The temperature dependence (30K>T>400 mK) and magnetic field dependence (H<50 kG) of hopping conduction have been measured as a function of impurity concentration and surface electric field in a quasi-two-dimensional impurity band formed in the inversion layer of a sodium-doped Si metal-oxide-semiconductor field-effect transistor. We find that our observations can be accommodated by noninteracting, single-particle hopping models based on percolation theory in which the effect of Coulomb interactions between electrons on different sites is ignored. Our observations are not consistent with the existence of a Coulomb gap in the single-particle excitation spectrum, although the gap was expected to determine the conductivity under the conditions examined in these experiments. © 1986 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Michiel Sprik
Journal of Physics Condensed Matter
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings
Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials