Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A perturbation method is used to confirm that the elastic contact stiffness associated with a flat-ended punch indenting a layered medium is insensitive to the cross-section shape of the punch as long as the shape does not differ too much from a circle. This result supports the practice of modeling nonaxisymmetric indenters such as Vickers or Berkovich indenters as an axisymmetric flat-ended cylindrical punch. © 1993, Materials Research Society. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Peter J. Price
Surface Science
Kenneth R. Carter, Robert D. Miller, et al.
Macromolecules
Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters