Experimental low temperature DRAM
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VLSI Circuits 1989
The appearance of stationary stripes in a voltage contrast SEM image of a circuit, generally known as voltage coding, is a commonly used technique for tracing circuit lines for failure analysis and for locating nodes for waveform measurements. Maintaining a steady striped image requires synchronizing a pattern generator to the SEM raster scan. A circuit is described which can be attached to any SEM to perform this synchronization, and which has a number of features which extend the usefulness of voltage coding. Copyright © 1990 Foundation for Advances in Medicine and Science, Inc.
W.H. Henkels, N.C.-C. Lu, et al.
VLSI Circuits 1989
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VLSI Technology 2002
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IEEE Electron Device Letters
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