J.H. Stathis, R. Bolam, et al.
INFOS 2005
No abstract available.
J.H. Stathis, R. Bolam, et al.
INFOS 2005
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
Robert W. Keyes
Physical Review B
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures