Ph.D. Zuoguang (Louis) Liu  Ph.D. Zuoguang (Louis) Liu photo       

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Research Staff Member
IBM Research, Albany NY USA
  +1dash518dash292dash7449

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Professional Associations

Professional Associations:  American Physical Society (APS)  |  IEEE Electron Devices Society (EDS)  |  Sigma Xi


2016

TUNNELING FIN TYPE FIELD EFFECT TRANSISTOR WITH EPITAXIAL SOURCE AND DRAIN REGIONS
Zuoguang Liu, Tenko Yamashita, Veeraraghavan S Basker, Chun-chen Yeh
Patent US Patent App. 15/042908

SELF ALIGNED EPITAXIAL BASED PUNCH THROUGH CONTROL
Chun-chen Yeh, Zuoguang Liu, Tenko Yamashita, Veeraraghavan S Basker
Patent US Patent App. 15/097741

S/D CONTACT RESISTANCE MEASUREMENT ON FINFETS
Chen Zhang, Zuoguang Liu, XIn Miao
Patent US Patent App. 15/134916

Airgap Spacers
Kangguo Cheng, Zuoguang Liu, Chun w Yeung
Patent US Patent App. 15/047123

RECESSED METAL LINER CONTACT WITH COPPER FILL
Zuoguang Liu, Veeraraghavan S Basker, Praneet Adusumilli, Huiming Bu
Patent US Patent App. 15/018387


2015

EXTREMELY THIN SILICON-ON-INSULATOR SILICON GERMANIUM DEVICE WITHOUT EDGE STRAIN RELAXATION
Juntao Li, Kangguo Cheng, Xin Miao, Zuoguang Liu
Patent US Patent App. 14/964026

DUAL SILICIDE LINER FLOW FOR ENABLING LOW CONTACT RESISTANCE
Veeraraghavan S Basker, Tenko Yamashita, Chun-chen Yeh, Zuoguang Liu, Praneet Adusumilli
Patent US Patent App. 14/928908

FORMING WRAP-AROUND SILICIDE CONTACT ON FINFET
Zuoguang Liu, Dechao Guo, Hemanth Jagannathan, Shogo Mochizuki
Patent US Patent App. 14/862767

METHOD AND STRUCTURE TO FABRICATE CLOSELY PACKED HYBRID NANOWIRES AT SCALED PITCH
Tenko Yamashita, Zuoguang Liu, Veeraraghavan S Basker, Chun-chen Yeh
Patent US Patent App. 14/850154

Composite Spacer Enabling Uniform Doping in Recessed FIN Devices
Zuoguang Liu, Tenko Yamashita, Veeraraghavan S Basker, Chun-chen Yeh
Patent US Patent App. 14/843321

Pure Boron for Silicide Contact
Zuoguang Liu, Tenko Yamashita, Sanjay Mehta, Chia-yu Chen
Patent US Patent App. 14/812399

Semiconductor Device Including Dual Spacer and Uniform Epitaxial Buffer Interface of Embedded SiGe Source/Drain
Zuoguang Liu, Tenko Yamashita, Chun-chen Yeh, Veeraraghavan S Basker
Patent US Patent App. 14/834481

Forming CMOSFET Structures with Different Contact Liners
Zuoguang Liu, Kangguo Cheng, Tenko Yamashita
Patent US Patent App. 14/829850

Epitaxial and Silicide Layer Formation at Top and Bottom Surfaces of Semiconductor Fins
Zuoguang Liu, Tenko Yamashita, Kangguo Cheng, Ruilong Xie
Patent US Patent App. 14/824349

Increased Contact Area for FINFETs
Veeraraghavan S Basker, Tenko Yamashita, Chun-chen Yeh, Chung-hsun Lin, Zuoguang Liu
Patent US Patent App. 14/794997

Nanowire Semiconductor Device Including Lateral-etch Barrier Region
Zuoguang Liu, Tenko Yamashita, Chun-chen Yeh, Veeraraghavan S Basker
Patent US Patent App. 14/748521

Symmetrical Extension Junction Formation with Low-K Spacer and Dual Epitaxial Process in Finfet Device
Chun-chen Yeh, Tenko Yamashita, Veeraraghavan S Basker, Zuoguang Liu
Patent US Patent App. 14/671115

FinFET Having Controlled Dielectric Region Height
Tenko Yamashita, Chun-chen Yeh, Dechao Guo, Zuoguang Liu
Patent US Patent App. 14/628749

Dual Fin Integration for Electron and Hole Mobility Enhancement
Zuoguang Liu, Chia-yu Chen, Tenko Yamashita, Miaomiao Wang
Patent US Patent App. 14/630072

Silicon Nitride Fill for PC Gap Regions to Increase Cell Density
Zuoguang Liu, Dechao Guo, Chun-chen Yeh, Tenko Yamashita
Patent US Patent App. 14/605142

Implantation Formed Metal-Insulator-Semiconductor (MIS) Contacts
Zuoguang Liu, Tenko Yamashita, Chia-yu Chen, Chun-chen Yeh
Patent US Patent App. 14/600077


2014

Punch Through Stopper in Bulk FinFET Device
Chun-chen Yeh, Veeraraghavan S Basker, Tenko Yamashita, Zuoguang Liu
Patent US Patent App. 61/980292

Low-Drive Current FinFET Structure for Improving Circuit Density of Ratioed Logic in SRAM Devices
Tenko Yamashita, Zuoguang Liu, Chun-chen Yeh, Dechao Guo, Veeraraghavan S Basker
Patent US Patent App. 14/581067

Silicon Nanowire Formation in Replacement Metal Gate Process
Tenko Yamashita, Zuoguang Liu, Chia-yu Chen
Patent US Patent App. 14/301587

Semiconductor Device Including Merged-Unmerged Work Function Metal and Variable Fin Pitch
Zuoguang Liu, Chun-Chen Yeh, Veeraraghavan S Basker, Tenko Tamashita,
Patent US Patent App. 14/225812

Shallow Trench Isolation for End Fin Variation Control
Veeraraghavan S Basker, Chun-Chen Yeh, Tenko Tamashita, Zuoguang Liu
Patent US Patent App. 14/223106

Dual Silicide Integration
Zuoguang Liu, Tenko Yamashita, Veeraraghavan S Basker, Chun-chen Yeh
Patent US Patent App. 14/166976


2013

Method and Structure for Multigate FinFET Device Epi-Extension Junction Control by Hydrogen Treatment
Zuoguang Liu, Tenko Yamashita, Chun-chen Yeh, Veeraraghavan S Basker
Patent US Patent App. 14/141051

FinFET Including Improved Epitaxial Topology
Zuoguang Liu, Tenko Yamashita, Veeraraghavan S Basker, Chun-chen Yeh
Patent US Patent App. 14/141575

Independent Gate Vertical FinFET Structure
Zuoguang Liu, Veeraraghavan S Basker, Chun-chen Yeh, Tenko Yamashita
Patent US Patent App. 14/141600