Michael Saccomanno  Michael Saccomanno photo       

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Semiconductor Process Engineer - SIMS Laboratory
Thomas J. Watson Research Center, Yorktown Heights, NY USA
  +1dash914dash945dash2578

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Professional Associations:  American Chemical Society

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More information:  LinkedIn Profile


2017

Unexpected impact of RIE gases on lithographic films
M. Glodde, R. L. Brice, M. J. P. Hopstaken, M. R. Saccomanno, N. Felix, K. E. Petrillo, B. Price
Proceedings Volume 10146, Advances in Patterning Materials and Processes XXXIV, SPIE - The International Society for Optics and Photonics, 2017
Abstract


2016

SIMS measurement of hydrogen and deuterium detection limits in silicon: Comparison of different SIMS instrumentation
Fred A. Stevie, Chaunzhen Zhou, Marinus Hopstaken, Michael Saccomanno, Zhichun Zhang, Andrew Turansky
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 34(3), American Vacuum Society, 2016
Abstract




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