Nathan Marchack  Nathan Marchack photo       

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Resarch Staff Member - Advanced Plasma Physics and Process
Thomas J. Watson Research Center, Yorktown Heights, NY USA
  +1dash914dash945dash1081

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Professional Associations

Professional Associations:  American Vacuum Society  |  Electrochemical Society (ECS)  |  Materials Research Society (MRS)

more information

More information:  Prof. Jane Chang, UCLA  |  Nathan Marchack on Youtube


2017

Low temperature encapsulation for magnetic tunnel junction
A.J. Annunziata, S.U. Engelmann, E.A. Joseph, G.P. Lauer, N.P. Marchack, D.A. Neumayer, M. Yamazaki
US Patent 9,691,972

Reduced process degradation of spin torque magnetoresistive random access memory
A.J. Annunziata, G.P. Lauer, N.P. Marchack, S.M. Rossnagel
US Patent App. 14/943,247

Enhanced coercivity in MTJ devices by contact depth control
Anthony J Annunziata, Gen P Lauer, Nathan P Marchack
US Patent 9,660,179

Spin torque mram fabrication using negative tone lithography and ion beam etching
A.J. Annunziata, A.A. Galan, S. Holmes, E.A. Joseph, G.P. Lauer, Q. Lin, N.P. Marchack
US Patent 9,705,077


2016

Techniques for forming contacts for active BEOL
Sebastian U Engelmann, Steve J Holmes, Qinghuang Lin, Nathan P Marchack, Eugene J O'sullivan
US Patent 9,490,164

Low degradation MRAM encapsulation process using silicon-rich silicon nitride film
Anthony J Annunziata, Chandrasekaran Kothandaraman, Gen P Lauer, Junghyuk Lee, Nathan P Marchack, Deborah A Neumayer, Eugene J O'sullivan, Jeong-heon Park
US Patent 9,515,252

Structure and method to reduce shorting in STT-MRAM device
Anthony J Annunziata, Gen P Lauer, Nathan P Marchack
US Patent 9,450,180


2015

Magnetic Tunnel Junction Patterning Using Low Atomic Weight Ion Sputtering
Anthony J Annunziata, Rohit Kilaru, Nathan P Marchack, Hiroyuki Miyazoe
US Patent 9,728,717