Martha I. Sanchez  Martha I. Sanchez photo       

contact information

Characterization of Materials for Microelectronics
Almaden Research Center, San Jose, CA, USA
  +1dash408dash927dash2276

links



2007

Apparatus for characterization of photoresist resolution, and method of use
W.D. Hinsberg III, J.A. Hoffnagle, F.A. Houle, M.I. Sanchez
US Patent 7,179,571


2006

Fast model-based optical proximity correction
A.E. Rosenbluth, G.M. Gallatin, R.L. Gordon, N. Seong, A.Y. Lvov, W.D. Hinsberg, J.A. Hoffnagle, F.A. Houle, M.I. Sanchez, others
US Patent 7,079,223


1997

Process for forming a circuit assembly
K.R. Carter, R.A. DiPietro, J.L. Hedrick, J.P. Hummel, R.D. Miller, M.I. Sanchez, W. Volksen, D.Y. Yoon
US Patent 5,633,034


1994

Process for forming negative tone images of polyimides using base treatment of crosslinked polyamic ester
M. Angelopoulos, D.G. Berger, J.W. Labadie, E.D. Perfecto, M.I. Sanchez, S.A. Swanson, W. Volksen
US Patent 5,310,625


1993

Process for forming negative tone images of polyimides for integrated circuit manufacture.
M. Angelopoulos, D.G. Berger, J.W. Labadie, E.D. Perfecto, M.I. Sanchez, S.A. Swanson, W. Volksen
EP Patent 0,560,530




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