John M. Papalia  John M. Papalia photo       

contact information

Advanced Plasma Processing Group
Thomas J. Watson Research Center, Yorktown Heights, NY USA
  +914dash945dash1338

links



2017

Directed self-assembly patterning strategies for phase change memory applications
Bruce, Robert L and Fraczak, Gloria and Papalia, John M and Tsai, HsinYu and BrightSky, Matt and Miyazoe, Hiroyuki and Zhu, Yu and Engelmann, Sebastian U and Lung, Hsiang-Lan and Masuda, Takeshi and others
SPIE Advanced Lithography, pp. 101490J--101490J, 2017


2016

Evaluation of ALE processes for patterning
Papalia, JM and Marchack, N and Bruce, RL and Miyazoe, H and Engelmann, SU and Joseph, EA
SPIE Advanced Lithography, pp. 97820H--97820H, 2016
Abstract

Applications for Surface Engineering Using Atomic Layer Etching-Invited Paper
Papalia, John and Marchack, Nathan and Bruce, Robert and Miyazoe, Hiroyuki and Engelmann, Sebastian and Joseph, Eric A
Solid State Phenomena, pp. 41--48, 2016


2010

Thin Films of Block Copolymer- Homopolymer Blends with a Continuously Tunable Density of Spherical Microdomains
Papalia, John M and Marencic, Andrew P and Adamson, Douglas H and Chaikin, Paul M and Register, Richard A
Macromolecules 43(17), 6946--6949, ACS Publications, 2010
Abstract

Thin Films of Block Copolymer- Homopolymer Blends with a Continuously Tunable Density of Spherical Microdomains
Papalia, John M and Marencic, Andrew P and Adamson, Douglas H and Chaikin, Paul M and Register, Richard A
Macromolecules 43(17), 6946--6949, ACS Publications, 2010
Abstract

Silicon nanowire polarizers for far ultraviolet (sub-200 nm) applications: Modeling and fabrication
Papalia, John M and Adamson, Douglas H and Chaikin, Paul M and Register, Richard A
Journal of Applied Physics 107(8), 084305, AIP Publishing, 2010

Thin Films of Block Copolymer- Homopolymer Blends with a Continuously Tunable Density of Spherical Microdomains
Papalia, John M and Marencic, Andrew P and Adamson, Douglas H and Chaikin, Paul M and Register, Richard A
Macromolecules 43(17), 6946--6949, ACS Publications, 2010


2009

Dilute Micelle Arrays in Block Copolymer Thin Films
Papalia, John and Register, Richard and Adamson, Douglas and Chaikin, Paul
APS Meeting Abstracts, 2009
Abstract


2008

Variable-Density Micelle Arrays in Block Copolymer Thin Films
Papalia, John and Adamson, Douglas and Register, Richard and Chaikin, Paul
APS March Meeting Abstracts, 2008
Abstract

PMSE 376-Silicon nanowire polarizers for deep ultraviolet applications: Fabrication and modeling
Papalia, John M and Hong, Young-Rae and Adamson, Douglas H and Chaikin, Paul M and Register, Richard A
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2008


2007

Self-ordering of spherical nanoparticles in a block copolymer system
Papalia, John M
Ph.D. Thesis, 2007
Abstract


2006

Spherical nanoparticle ordering in block copolymer systems
Papalia, John and Galvin, Mary
APS March Meeting Abstracts, 2006
Abstract