Hsinyu (Sidney) Tsai  Hsinyu (Sidney) Tsai photo       

contact information

Research Staff Member, Lithography, Exploratory Devices, Neuromorphic Computing
Almaden Research Center, San Jose, CA, USA
  +1dash408dash927dash2073

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2017

2-dimensional patterning employing tone inverted graphoepitaxy
Guillorn, Michael A and Lai, Kafai and Pitera, Jed W and Tsai, Hsinyu
US Patent 9,581,899
Abstract

Method and system for template pattern optimization for DSA patterning using graphoepitaxy
Guillorn, Michael A and Lai, Kafai and Ozlem, Melih and Tsai, Hsinyu
US Patent 9,582,631
Abstract

Pattern decomposition for directed self assembly patterns templated by sidewall image transfer
Cheng, Joy and Guillorn, Michael A and Liu, Chi-chun and Tsai, Hsinyu
US Patent App. 15/397,092
Abstract

Chemoepitaxy etch trim using a self aligned hard mask for metal line to via
Brink, Markus and Guillorn, Michael A and Lin, Chung-Hsun and Tsai, Hsinyu
US Patent App. 15/467,665
Abstract

Graphoepitaxy directed self-assembly process for semiconductor fin formation
Cheng, Joy and Colburn, Matthew E and Guillorn, Michael A and Liu, Chi-chun and Tjio, Melia and Tsai, Hsinyu
US Patent 9,659,824
Abstract


2016

Sublithographic Kelvin structure patterned with DSA
Chang, Josephine B and Guillorn, Michael A and Lin, Chung-Hsun and Tsai, Hsinyu
US Patent 9,385,027
Abstract

Electrode pair fabrication using directed self assembly of diblock copolymers
Chang, Josephine B and Guillorn, Michael A and Miyazoe, Hiroyuki and Pyzyna, Adam M and Tsai, Hsinyu
US Patent 9,306,164

Chemo epitaxy mask generation
Cheng, Joy and Doerk, Gregory S and Guillorn, Michael A and Lai, Kafai and Tsai, Hsinyu
US Patent 9,514,263
Abstract

Dielectric tone inversion materials
Glodde, Martin and Huang, Wu-song and Miyazoe, Hiroyuki and Sooriyakumaran, Ratnam and Tsai, Hsinyu
US Patent 9,337,033


2015

Chemoepitaxy-based directed self assembly process with tone inversion for unidirectional wiring
Brink, Markus and Cheng, Joy and Doerk, Gregory S and Guillorn, Michael A and Tsai, Hsinyu
US Patent App. 14/839,235
Abstract

Local tailoring of fingers in multi-finger fin field effect transistors
Brink, Markus and Chang, Josephine B and Guillorn, Michael A and Tsai, Hsinyu
US Patent 9,053,982
Abstract

Resist performance for the negative tone develop organic development process
Bozano, Luisa D and Goldfarb, Dario L and Sundberg, Linda K and Truong, Hoa D and Tsai, Hsinyu and Wallraff, Gregory M
US Patent 9,057,960
Abstract


2014

Fin design level mask decomposition for directed self assembly
Dechene, Daniel J and Guillorn, Michael A and Lai, Kafai and Pitera, Jed W and Tsai, Hsinyu
US Patent 8,656,322
Abstract


2013

Graphene Nanomesh Based Charge Sensor
Ali Afzali-ardakani, Shu-jen Han, Amal Kasry, Ahmed Maarouf, Glenn J Martyna, Razvan Nistor, Hsinyu Tsai
US Patent 20,130,143,769


2012

Tone inversion of self-assembled self-aligned structures
Michael A Guillorn, Steven J Holmes, Chi-chun Liu, Hiroyuki Miyazoe, Hsinyu Tsai
US Patent App. 13/587,088