Eric A. Joseph  Eric A. Joseph photo       

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Senior Manager and Research Staff Member, Advanced Materials and Unit Process Technology
Thomas J. Watson Research Center, Yorktown Heights, NY USA
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Professional Associations

Professional Associations:  American Vacuum Society  |  IEEE Nuclear and Plasma Sciences Society  |  Materials Research Society (MRS)


2017

Nano deposition and ablation for the repair and fabrication of integrated circuits
Adderly, Shawn A and Gambino, Jeffrey P and Joseph, Eric A and Speranza, Anthony C
US Patent 9,583,401
Abstract

Spin torque mram fabrication using negative tone lithography and ion beam etching
A.J. Annunziata, A.A. Galan, S. Holmes, E.A. Joseph, G.P. Lauer, Q. Lin, N.P. Marchack
US Patent 9,705,077

High aspect ratio patterning of hard mask materials by organic soft masks
Brink, Markus and Engelmann, Sebastian U and Joseph, Eric A and Miyazoe, Hiroyuki
US Patent 9,728,421

Etch rate enhancement for a silicon etch process through etch chamber pretreatment
Joseph, Eric A and Matsuura, Goh and Nakamura, Masahiro and Sikorski, Edmund M and To, Bang N
US Patent 9,711,365
Abstract

Low temperature encapsulation for magnetic tunnel junction
A.J. Annunziata, S.U. Engelmann, E.A. Joseph, G.P. Lauer, N.P. Marchack, D.A. Neumayer, M. Yamazaki
US Patent 9,691,972


2016

Hybrid subtractive etch/metal fill process for fabricating interconnects
Bruce, Robert L and Fritz, Gregory M and Joseph, Eric A and Miyazoe, Hiroyuki
US Patent App. 15/157,891
Abstract


2015


Low resistance metal contacts to interconnects
Gates, Stephen M and Fritz, Gregory M and Joseph, Eric A and Spooner, Terry A
US Patent App. 14/749,811
Abstract

Hydrofluorocarbon gas-assisted plasma etch for interconnect fabrication
Bruce, Robert L and Joseph, Eric A and Lee, Joe and Suzuki, Takefumi
US Patent App. 14/849,077
Abstract

Interconnects based on subtractive etching of silver
Baker-O'Neal, Brett C and Joseph, Eric A and Miyazoe, Hiroyuki
US Patent App. 14/615,077
Abstract

THIN FILM INTERCONNECTS WITH LARGE GRAINS
Bruce, Robert L and Cabral Jr, Cyril and Fritz, Gregory M and Joseph, Eric A and Lofaro, Michael F and Miyazoe, Hiroyuki and Rodbell, Kenneth P and Shahidi, Ghavam G
US Patent 20,150,348,832

Sidewall image transfer for heavy metal patterning in integrated circuits
Brink, Markus and Guillorn, Michael A and Hoinkis, Mark D and Joseph, Eric A and Miyazoe, Hiroyuki and To, Bang N
US Patent 9,171,796
Abstract


2014

FABRICATING A SMALL-SCALE RADIATION DETECTOR
Michael S Gordon, Christopher V Jahnes, Eric A Joseph, Hiroyuki Miyazoe, Kenneth P Rodbell, Arun Sharma, Sri M Sri-jayantha
US Patent 20,140,329,351

COPPER RESIDUE CHAMBER CLEAN
Mark Hoinkis, Chun Yan, Hiroyuki Miyazoe, Eric Joseph
US Patent 20,140,345,645

Catalytic Etch With Magnetic Direction Control
Eric A Joseph, David W Abraham, Roger W Cheek, Alejandro G Schroit, Ying Zhang
US Patent 20,140,191,371

Small footprint phase change memory cell
Matthew J Breitwisch, Eric A Joseph, Chung H Lam, Hsiang-Lan Lung
US Patent 8,728,859




2013


Self-Aligned Pitch Split For Unidirectional Metal Wiring
Josephine B Chang, Michael A Guillorn, Eric A Joseph, Hiroyuki Miyazoe
US Patent App. 13/793,859

WET CLEAN PROCESS FOR REMOVING CxHyFz ETCH RESIDUE
RL Bruce, SU Engelmann, EA Joseph, M Khojasteh, M Nakamura, SS Papa Rao, BN To, GG Totir, Y Zhu


Flat lower bottom electrode for phase change memory cell
Matthew J Breitwisch, Eric A Joseph, Chung H Lam, Hsiang-Lan Lung, Alejandro G Schrott
US Patent 8,471,236

Thermally insulated phase change material memory cells
Matthew J Breitwisch, Roger W Cheek, Eric A Joseph, Chung H Lam, Bipin Rajendran, Alejandro G Schrott, Yu Zhu
US Patent 8,536,675

Scaled-down phase change memory cell in recessed heater
Eric Andrew Joseph, Chung Hon Lam, Alejandro Gabriel Schrott
US Patent 8,426,967

Thermally insulated phase change material cells
Matthew J BrightSky, Roger W Cheek, Chung H Lam, Eric A Joseph, Bipin Rajendran, Alejandro G Schrott, Yu Zhu
US Patent App. 13/948,166

Magnetic spin shift register memory
Eric A Joseph, Stuart SP Parkin, Mary B Rothwell
US Patent 8,467,221

Nanopore sensor device
Josephine B Chang, Michael A Guillorn, Eric A Joseph, Satyavolu S Papa Rao
US Patent App. 14/013,598

Methods to fabricate silicide micromechanical device
Michael A Guillorn, Eric A Joseph, Fei Liu, Zhen Zhang
US Patent 8,470,628

Thermally insulated phase material cells
Matthew J Breitwisch, Roger W Cheek, Eric A Joseph, Chung H Lam, Bipin Rajendran, Alejandro G Schrott, Yu Zhu
US Patent 8,466,006



2012

Thermally insulated phase change material memory cells with pillar structure
Matthew J Breitwisch, Roger W Cheek, Eric A Joseph, Chung H Lam, Bipin Rajendran, Alejandro G Schrott, Yu Zhu
US Patent 8,138,056

Silicide Micromechanical Device and Methods to Fabricate Same
Michael A Guillorn, Eric A Joseph, Fei Liu, Zhen Zhang
US Patent App. 13/625,294

Field effect transistor having nanostructure channel
Josephine B Chang, Michael A Guillorn, Eric A Joseph
US Patent 8,288,236

In via formed phase change memory cell with recessed pillar heater
Matthew J Breitwisch, Roger W Cheek, Eric A Joseph, Chung H Lam, Alejandro G Schrott
US Patent 8,105,859

Pore phase change material cell fabricated from recessed pillar
Alejandro G Schrott, Chung H Lam, Eric A Joseph, Matthew J Breitwisch, Roger W Cheek
US Patent 8,330,137


Method to reduce a via area in a phase change memory cell
Matthew J Breitwisch, Eric A Joseph, Chung H Lam, Alejandro G Schrott, Yu Zhu
US Patent 8,338,225


PILLAR-BASED INTERCONNECTS FOR MAGNETORESISTIVE RANDOM ACCESS MEMORY
Solomon Assefa, Michael C Gaidis, Eric A Joseph, Eugene J O'sullivan
US Patent 20,120,299,136

Method for forming a self-aligned bit line for PCRAM and self-aligned etch back process
Matthew J Breitwisch, Chieh-Fang Chen, Shih-Hung Chen, Eric A Joseph, Chung Hon Lam, Michael F Lofaro, Hsiang-Lan Lung, Alejandro G Schrott, Min Yang, others
US Patent 8,273,598

Method for manufacturing a phase change memory device with pillar bottom electrode
Matthew J Breitwisch, Geoffrey William Burr, Yi Chou Chen, Shih Hung Chen, Chieh Fang Chen, Thomas D Happ, Eric Andrew Joseph, Chung Hon Lam, Hsiang Lan Lung, Jan Boris Philipp, others
US Patent 8,138,028

Nanoscale electrodes for phase change memory devices
Sarunya Bangsaruntip, Matthew J Breitwisch, Eric A Joseph, Chung H Lam, Bipin Rajendran, Mary Beth Rothwell, Alejandro G Schrott
US Patent 8,119,528

Integrated circuit including electrode having recessed portion
Matthew Breitwisch, Shihhung Chen, Thomas Happ, Eric Joseph
US Patent 8,189,372


2011

Self aligned ring electrodes
Matthew J Breitwisch, Eric A Joseph, Chung H Lam, Alejandro G Schrott, Brandon Yee
US Patent 7,981,755


Etching of tungsten selective to titanium nitride
Matthew J Breitwisch, Eric A Joseph, Chung H Lam, Alejandro G Schrott, Brandon Yee
US Patent 7,972,966

Heat shield liner in a phase change memory cell
Eric A Joseph, Chung H Lam, Son V Nguyen, Alejandro G Schrott
US Patent App. 13/268,151

Phase change memory with tapered heater
Matthew Breitwisch, Thomas Happ, Eric A Joseph, Hsiang-Lan Lung, Jan Boris Philipp
US Patent 7,910,911

Phase change memory device with plated phase change material
Matthew J Breitwisch, Eric A Joseph, Alejandro G Schrott, Xiaoyan Shao
US Patent 8,030,130


2010

Programmable-resistance memory cell
J. G. Bednorz, E. A. Joseph, S. F. Karg, C. H. Lam, G. I. Meijer, A. G. Schrott
United States Patent US 7,834,339

Method of forming ring electrode
Eric A Joseph, Chung H Lam, Alejandro G Schrott
US Patent 7,709,325

Programmable-resistance memory cell
J. G. Bednorz, E. A. Joseph, S. F. Karg, C. H. Lam, G. I. Meijer, A. G. Schrott
US Patent 7,834,339


2009

Phase change material with filament electrode
Breitwisch, Matthew J and Cheek, Roger W and Joseph, Eric A and Lam, Chung H and Schrott, Alejandro G and Meijer, Gerhard Ingmar
US Patent 7,560,721
Abstract

Phase change material with filament electrode
M. J. Breitwisch, R. W. Cheek, E. A. Joseph, C. H. Lam, G. I. Meijer, A. G. Schrott
United States Patent US 7,560,721

Phase change memory cell with electrode
Matthew J Breitwisch, Roger W Cheek, Eric A Joseph, Chung H Lam, Alejandro G Schrott
US Patent 7,485,487

Phase Change Memory Cell with Reduced Switchable Volume
M J Breitwisch, R W Cheek, E A Joseph, C H Lam, H Lung, A G Schrott


2008

Method to reduce reset current of pcm using stress liner layers
Breitwisch, Mathew J and Joseph, Eric A and Lam, Chung H and Rajendran, Bipin and Schrott, Alejandro G
US Patent App. 12/243,809
Abstract

Method and apparatus for fabricating sub-lithography data tracks for use in magnetic shift register memory devices
Solomon Assefa, Michael C Gaidis, Eric A Joseph, Stuart Stephen Papworth Parkin, Christy S Tyberg
WO Patent App. PCT/US2008/073,066

Electrode formed in aperture defined by a copolymer mask
Matthew J Breitwisch, Matthew Colburn, Eric Joseph, Chung Hon Lam, Deborah A Neumayer, Alejandro G Schrott
US Patent App. 12/052,581

METHOD TO ENHANCE PERFORMANCE OF COMPLEX METAL OXIDE PROGRAMMABLE MEMORY
E.A. Joseph, C.H. Lam, G.I. Meijer, S.M. Rossnagel, A.G. Schrott
US Patent App. 12/017,848


2007

Uniform critical dimension size pore for pcram application
Matthew J Breitwisch, Roger W Cheek, Chung H Lam, Hsiang-Lan Lung, Eirc A Joseph, Alejandro G Schrott, others
US Patent App. 11/620,671

Method of Forming Phase Change Memory Cell With Reduced Switchable Volume
Matthew J Breitwisch, Roger W Cheek, Eric Andrew Joseph, Chung Hon Lam, Hsiang-Lan Lung, Alejandro Gabriel Schrott
US Patent App. 11/741,781


2003

Polysilicon processing using an anti-reflective dual layer hardmask for 193 nm lithography
Thakar, Gautam V and Laaksonen, Reima T and Gross, Cameron and Joseph, Eric A
US Patent 6,624,068
Abstract