Nathan Marchack  Nathan Marchack photo       

contact information

Resarch Staff Member - Advanced Plasma Physics and Process
Thomas J. Watson Research Center, Yorktown Heights, NY USA


Professional Associations

Professional Associations:  American Vacuum Society  |  Electrochemical Society (ECS)  |  Materials Research Society (MRS)

more information

More information:  Prof. Jane Chang, University of California, Los Angeles  |  YouTube Channel


Nathan Marchack received his PhD in Chemical Engineering from the University of California, Los Angeles in 2012. His thesis work in Professor Jane Chang's group focused on characterizing and modeling the etching behavior of hafnium lanthanate high-k dielectric films in chlorine-based plasmas.

He subsequently joined the IBM T.J. Watson Research Center in Yorktown Heights, NY as a Research Staff Member in the Advanced Plasma Processing Group. His primary research areas include developing plasma etch processes for potential future non-volatile memory technologies (e.g. MRAM), and experimental gas chemistries for FEOL patterning applications (e.g. low-k spacer etching for FinFETS).